VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
INDUSTRIAL DIAMOND 45 DEG TOA, SCREEN, ION ETCH 20s 3 KeV
1

NORM
REGULAR
3
0
0
0
0
0
3

INDUSTRIAL DIAMOND 45 DEG TOA, SCREEN, ION ETCH 20s 3 KeV
2003
5
7
23
9
13
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
2
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
292
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
20
4.00E-06
0
0
0
0
512
0
592
0.338811
0.342204
43
0.342204
46
0.34219
62
0.342177
48
0.342163
56
0.34215
50
0.342136
45
0.342123
74
0.342109
53
0.342096
33
0.342082
61
0.342069
71
0.342055
55
0.342042
64
0.342028
52
0.342015
51
0.342001
60
0.341988
49
0.341975
53
0.341961
52
0.341948
53
0.341934
79
0.341921
60
0.341907
70
0.341894
44
0.34188
50
0.341867
71
0.341854
60
0.34184
44
0.341827
68
0.341813
57
0.3418
55
0.341786
49
0.341773
72
0.341759
58
0.341746
58
0.341733
46
0.341719
41
0.341706
43
0.341692
58
0.341679
46
0.341665
45
0.341652
46
0.341639
65
0.341625
45
0.341612
48
0.341598
70
0.341585
47
0.341572
59
0.341558
58
0.341545
46
0.341531
31
0.341518
62
0.341504
56
0.341491
55
0.341478
54
0.341464
54
0.341451
57
0.341437
55
0.341424
71
0.341411
46
0.341397
62
0.341384
58
0.34137
68
0.341357
49
0.341344
45
0.34133
64
0.341317
54
0.341304
71
0.34129
61
0.341277
65
0.341263
66
0.34125
71
0.341237
52
0.341223
77
0.34121
65
0.341196
62
0.341183
55
0.34117
66
0.341156
70
0.341143
72
0.34113
76
0.341116
54
0.341103
62
0.34109
55
0.341076
60
0.341063
71
0.341049
51
0.341036
46
0.341023
70
0.341009
62
0.340996
76
0.340983
57
0.340969
48
0.340956
47
0.340943
52
0.340929
66
0.340916
68
0.340903
60
0.340889
67
0.340876
73
0.340863
83
0.340849
59
0.340836
71
0.340823
75
0.340809
70
0.340796
58
0.340783
64
0.340769
75
0.340756
71
0.340743
83
0.340729
63
0.340716
64
0.340703
66
0.340689
78
0.340676
63
0.340663
92
0.340649
67
0.340636
104
0.340623
89
0.340609
73
0.340596
65
0.340583
66
0.340569
91
0.340556
95
0.340543
119
0.340529
104
0.340516
140
0.340503
138
0.34049
154
0.340476
179
0.340463
194
0.34045
247
0.340436
253
0.340423
236
0.34041
314
0.340396
311
0.340383
354
0.34037
388
0.340357
395
0.340343
378
0.34033
388
0.340317
430
0.340303
455
0.34029
466
0.340277
486
0.340264
511
0.34025
483
0.340237
499
0.340224
497
0.340211
592
0.340197
582
0.340184
562
0.340171
542
0.340157
531
0.340144
503
0.340131
479
0.340118
435
0.340104
370
0.340091
306
0.340078
263
0.340065
216
0.340051
193
0.340038
143
0.340025
127
0.340012
94
0.339998
74
0.339985
52
0.339972
34
0.339959
35
0.339945
28
0.339932
30
0.339919
47
0.339906
22
0.339892
21
0.339879
23
0.339866
19
0.339853
6
0.339839
9
0.339826
34
0.339813
14
0.3398
0
0.339787
15
0.339773
8
0.33976
19
0.339747
7
0.339734
12
0.33972
8
0.339707
27
0.339694
12
0.339681
12
0.339668
11
0.339654
9
0.339641
13
0.339628
8
0.339615
21
0.339601
27
0.339588
32
0.339575
12
0.339562
24
0.339549
18
0.339535
4
0.339522
9
0.339509
12
0.339496
19
0.339483
24
0.339469
26
0.339456
21
0.339443
17
0.33943
10
0.339417
21
0.339404
42
0.33939
15
0.339377
39
0.339364
14
0.339351
36
0.339338
29
0.339324
14
0.339311
34
0.339298
29
0.339285
21
0.339272
25
0.339259
16
0.339245
28
0.339232
28
0.339219
24
0.339206
35
0.339193
30
0.33918
28
0.339166
23
0.339153
12
0.33914
31
0.339127
23
0.339114
9
0.339101
10
0.339087
22
0.339074
38
0.339061
32
0.339048
35
0.339035
27
0.339022
33
0.339008
14
0.338995
21
0.338982
33
0.338969
41
0.338956
10
0.338943
23
0.33893
29
0.338916
22
0.338903
9
0.33889
19
0.338877
22
0.338864
28
0.338851
24
0.338838
28
0.338825
23
0.338811

INDUSTRIAL DIAMOND 45 DEG TOA, SCREEN, ION ETCH 20s 3 KeV
2003
5
7
23
9
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
2
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
2048
117
24295
0.300125
0.586563
1545
0.586563
1506
0.585857
1524
0.585154
1558
0.584452
1544
0.583753
1508
0.583056
1521
0.582362
1570
0.581669
1461
0.580979
1531
0.580291
1522
0.579605
1485
0.578921
1507
0.578239
1557
0.57756
1565
0.576883
1542
0.576207
1503
0.575534
1512
0.574863
1525
0.574194
1559
0.573527
1545
0.572862
1553
0.5722
1629
0.571539
1611
0.57088
1624
0.570223
1667
0.569569
1641
0.568916
1554
0.568265
1615
0.567617
1670
0.56697
1630
0.566325
1599
0.565682
1572
0.565041
1561
0.564402
1564
0.563765
1531
0.56313
1533
0.562497
1502
0.561866
1445
0.561236
1512
0.560609
1515
0.559983
1473
0.559359
1440
0.558737
1450
0.558117
1496
0.557499
1481
0.556882
1476
0.556268
1453
0.555655
1483
0.555044
1433
0.554434
1435
0.553827
1445
0.553221
1483
0.552617
1399
0.552015
1465
0.551415
1418
0.550816
1417
0.550219
1476
0.549624
1509
0.54903
1504
0.548438
1498
0.547848
1477
0.54726
1506
0.546673
1542
0.546088
1499
0.545504
1552
0.544922
1458
0.544342
1470
0.543764
1507
0.543187
1488
0.542612
1576
0.542038
1557
0.541466
1565
0.540896
1630
0.540327
1478
0.53976
1470
0.539194
1514
0.53863
1524
0.538068
1556
0.537507
1496
0.536948
1546
0.53639
1556
0.535834
1553
0.535279
1531
0.534726
1601
0.534174
1483
0.533624
1541
0.533075
1551
0.532528
1520
0.531983
1500
0.531438
1563
0.530896
1549
0.530355
1573
0.529815
1578
0.529277
1564
0.52874
1611
0.528204
1556
0.527671
1569
0.527138
1574
0.526607
1572
0.526077
1537
0.525549
1589
0.525022
1528
0.524497
1505
0.523973
1612
0.52345
1475
0.522929
1588
0.522409
1624
0.521891
1595
0.521374
1637
0.520858
1553
0.520344
1557
0.519831
1503
0.519319
1534
0.518809
1547
0.5183
1494
0.517792
1578
0.517286
1569
0.516781
1552
0.516277
1490
0.515775
1419
0.515274
1538
0.514774
1564
0.514276
1539
0.513778
1476
0.513282
1500
0.512788
1612
0.512294
1588
0.511802
1600
0.511311
1548
0.510822
1564
0.510333
1602
0.509846
1564
0.50936
1550
0.508876
1537
0.508392
1573
0.50791
1513
0.507429
1597
0.506949
1582
0.506471
1558
0.505993
1536
0.505517
1550
0.505042
1537
0.504569
1621
0.504096
1613
0.503625
1554
0.503154
1569
0.502685
1518
0.502217
1466
0.501751
1575
0.501285
1596
0.500821
1629
0.500357
1590
0.499895
1609
0.499434
1663
0.498974
1559
0.498515
1630
0.498058
1651
0.497601
1602
0.497146
1615
0.496692
1577
0.496238
1594
0.495786
1670
0.495335
1640
0.494885
1588
0.494437
1588
0.493989
1604
0.493542
1621
0.493097
1656
0.492652
1552
0.492209
1536
0.491766
1504
0.491325
1592
0.490885
1480
0.490445
1519
0.490007
1604
0.48957
1565
0.489134
1550
0.488699
1628
0.488265
1580
0.487832
1546
0.4874
1510
0.486969
1560
0.486539
1631
0.48611
1533
0.485682
1594
0.485255
1723
0.48483
1617
0.484405
1528
0.483981
1598
0.483558
1594
0.483136
1636
0.482715
1594
0.482295
1584
0.481876
1631
0.481458
1559
0.481041
1589
0.480624
1526
0.480209
1636
0.479795
1595
0.479382
1593
0.47897
1610
0.478558
1660
0.478148
1655
0.477738
1695
0.47733
1570
0.476922
1605
0.476515
1619
0.47611
1614
0.475705
1668
0.475301
1661
0.474898
1615
0.474496
1667
0.474094
1619
0.473694
1697
0.473295
1647
0.472896
1619
0.472499
1664
0.472102
1749
0.471706
1627
0.471311
1679
0.470917
1640
0.470524
1628
0.470131
1660
0.46974
1693
0.469349
1675
0.46896
1625
0.468571
1664
0.468183
1751
0.467796
1733
0.467409
1657
0.467024
1667
0.466639
1636
0.466256
1671
0.465873
1702
0.465491
1709
0.465109
1665
0.464729
1656
0.464349
1681
0.463971
1690
0.463593
1730
0.463215
1729
0.462839
1700
0.462464
1731
0.462089
1729
0.461715
1726
0.461342
1780
0.46097
1656
0.460598
1704
0.460228
1748
0.459858
1713
0.459489
1724
0.459121
1672
0.458753
1665
0.458386
1702
0.45802
1735
0.457655
1692
0.457291
1708
0.456927
1686
0.456564
1717
0.456202
1710
0.455841
1784
0.455481
1733
0.455121
1789
0.454762
1826
0.454403
1746
0.454046
1819
0.453689
1743
0.453333
1767
0.452978
1829
0.452623
1756
0.452269
1817
0.451916
1748
0.451564
1781
0.451213
1778
0.450862
1777
0.450511
1856
0.450162
1825
0.449813
1823
0.449465
1806
0.449118
1766
0.448772
1898
0.448426
1783
0.448081
1821
0.447736
1937
0.447393
1888
0.44705
1842
0.446707
1783
0.446366
1773
0.446025
1753
0.445684
1806
0.445345
1840
0.445006
1879
0.444668
1753
0.44433
1786
0.443994
1899
0.443658
1803
0.443322
1827
0.442987
1885
0.442653
1798
0.44232
1792
0.441987
1724
0.441655
1723
0.441324
1758
0.440993
1728
0.440663
1751
0.440333
1741
0.440005
1739
0.439676
1743
0.439349
1742
0.439022
1746
0.438696
1859
0.438371
1792
0.438046
1722
0.437721
1838
0.437398
1779
0.437075
1738
0.436752
1779
0.436431
1772
0.43611
1715
0.435789
1803
0.435469
1760
0.43515
1795
0.434832
1807
0.434514
1804
0.434196
1862
0.43388
1811
0.433564
1875
0.433248
1796
0.432933
1787
0.432619
1760
0.432305
1860
0.431992
1880
0.43168
1808
0.431368
1880
0.431057
1868
0.430746
1687
0.430436
1769
0.430127
1791
0.429818
1792
0.42951
1817
0.429202
1789
0.428895
1715
0.428588
1860
0.428282
1814
0.427977
1936
0.427672
1831
0.427368
1872
0.427065
1805
0.426762
1894
0.426459
1884
0.426157
1933
0.425856
1870
0.425555
1863
0.425255
1878
0.424955
1926
0.424656
1807
0.424358
1942
0.42406
1813
0.423762
1867
0.423466
1753
0.423169
1956
0.422874
1833
0.422579
1914
0.422284
1880
0.42199
2013
0.421696
1920
0.421403
1880
0.421111
1911
0.420819
1895
0.420528
1850
0.420237
1923
0.419946
1898
0.419657
1863
0.419368
1921
0.419079
1988
0.418791
1969
0.418503
1960
0.418216
1941
0.417929
1898
0.417643
1893
0.417358
1877
0.417073
1949
0.416788
1967
0.416504
1961
0.416221
1956
0.415938
1944
0.415655
1867
0.415373
1990
0.415092
1960
0.414811
1942
0.414531
2032
0.414251
2040
0.413971
2021
0.413693
1974
0.413414
1955
0.413136
1979
0.412859
1989
0.412582
1975
0.412305
2062
0.41203
2022
0.411754
2085
0.411479
1945
0.411205
1988
0.410931
2062
0.410657
2070
0.410384
2024
0.410112
1989
0.40984
2059
0.409568
1958
0.409297
2125
0.409027
2084
0.408757
2113
0.408487
2084
0.408218
2007
0.407949
2082
0.407681
2029
0.407413
1993
0.407146
2010
0.406879
2026
0.406613
2141
0.406347
2093
0.406081
2117
0.405816
2096
0.405552
2130
0.405288
2116
0.405024
2123
0.404761
2114
0.404499
2157
0.404236
2180
0.403975
2124
0.403713
2097
0.403452
2202
0.403192
2088
0.402932
2105
0.402673
2136
0.402414
2188
0.402155
2150
0.401897
2204
0.401639
2194
0.401382
2125
0.401125
2171
0.400868
2237
0.400612
2133
0.400357
2103
0.400102
2247
0.399847
2178
0.399593
2163
0.399339
2178
0.399086
2174
0.398833
2241
0.39858
2228
0.398328
2223
0.398076
2250
0.397825
2246
0.397574
2207
0.397324
2248
0.397074
2290
0.396824
2259
0.396575
2296
0.396326
2237
0.396078
2292
0.39583
2303
0.395583
2213
0.395335
2257
0.395089
2303
0.394843
2305
0.394597
2291
0.394351
2274
0.394106
2264
0.393862
2225
0.393617
2220
0.393374
2221
0.39313
2321
0.392887
2284
0.392644
2269
0.392402
2257
0.39216
2300
0.391919
2449
0.391678
2557
0.391437
2712
0.391197
3057
0.390957
3193
0.390718
3178
0.390479
2658
0.39024
2332
0.390002
2207
0.389764
2251
0.389526
2294
0.389289
2271
0.389052
2269
0.388816
2271
0.38858
2343
0.388344
2342
0.388109
2258
0.387874
2221
0.38764
2281
0.387406
2288
0.387172
2302
0.386939
2305
0.386706
2302
0.386473
2246
0.386241
2365
0.386009
2331
0.385778
2318
0.385547
2276
0.385316
2425
0.385086
2355
0.384856
2352
0.384626
2449
0.384397
2362
0.384168
2386
0.383939
2382
0.383711
2290
0.383483
2402
0.383256
2460
0.383029
2384
0.382802
2379
0.382576
2382
0.38235
2410
0.382124
2398
0.381899
2451
0.381674
2429
0.381449
2365
0.381225
2466
0.381001
2404
0.380777
2474
0.380554
2483
0.380331
2419
0.380109
2412
0.379887
2473
0.379665
2473
0.379443
2507
0.379222
2547
0.379001
2564
0.378781
2482
0.378561
2543
0.378341
2542
0.378122
2445
0.377903
2557
0.377684
2556
0.377465
2542
0.377247
2674
0.37703
2607
0.376812
2629
0.376595
2627
0.376379
2508
0.376162
2610
0.375946
2503
0.37573
2605
0.375515
2620
0.3753
2584
0.375085
2592
0.374871
2617
0.374657
2512
0.374443
2669
0.374229
2612
0.374016
2615
0.373803
2610
0.373591
2655
0.373379
2629
0.373167
2727
0.372956
2641
0.372744
2680
0.372533
2586
0.372323
2672
0.372113
2692
0.371903
2677
0.371693
2623
0.371484
2675
0.371275
2730
0.371066
2627
0.370858
2802
0.37065
2687
0.370442
2702
0.370235
2712
0.370028
2627
0.369821
2640
0.369614
2788
0.369408
2711
0.369202
2746
0.368997
2721
0.368791
2738
0.368586
2765
0.368382
2793
0.368177
2811
0.367973
2799
0.36777
2808
0.367566
2833
0.367363
2679
0.36716
2731
0.366958
2871
0.366755
2836
0.366553
2918
0.366352
2828
0.36615
2871
0.365949
2913
0.365749
2864
0.365548
2895
0.365348
2784
0.365148
2865
0.364948
2849
0.364749
2801
0.36455
2868
0.364351
2892
0.364153
2854
0.363955
2959
0.363757
2984
0.363559
2964
0.363362
3016
0.363165
2884
0.362968
2952
0.362772
2885
0.362576
2878
0.36238
3003
0.362184
2953
0.361989
3085
0.361794
3023
0.361599
3054
0.361404
3130
0.36121
3010
0.361016
3063
0.360823
2976
0.360629
2997
0.360436
3040
0.360243
3101
0.360051
2985
0.359859
3070
0.359667
3184
0.359475
3116
0.359283
3163
0.359092
3128
0.358901
3144
0.358711
3012
0.35852
3160
0.35833
3093
0.35814
3137
0.357951
3137
0.357762
3232
0.357573
3161
0.357384
3296
0.357195
3208
0.357007
3197
0.356819
3235
0.356631
3258
0.356444
3197
0.356257
3230
0.35607
3276
0.355883
3177
0.355697
3290
0.355511
3192
0.355325
3193
0.355139
3394
0.354954
3319
0.354769
3298
0.354584
3373
0.354399
3318
0.354215
3407
0.354031
3268
0.353847
3286
0.353664
3386
0.35348
3417
0.353297
3460
0.353114
3443
0.352932
3522
0.352749
3442
0.352567
3440
0.352386
3584
0.352204
3462
0.352023
3566
0.351842
3552
0.351661
3593
0.35148
3715
0.3513
3629
0.35112
3593
0.35094
3734
0.350761
3617
0.350581
3713
0.350402
3603
0.350223
3590
0.350045
3578
0.349866
3475
0.349688
3575
0.34951
3530
0.349333
3565
0.349155
3482
0.348978
3389
0.348801
3485
0.348625
3421
0.348448
3499
0.348272
3393
0.348096
3577
0.34792
3478
0.347745
3445
0.34757
3529
0.347395
3657
0.34722
3728
0.347045
3766
0.346871
3844
0.346697
3976
0.346523
4146
0.34635
4249
0.346176
4249
0.346003
4206
0.34583
4299
0.345657
4289
0.345485
4287
0.345313
4249
0.345141
4098
0.344969
4080
0.344797
3985
0.344626
3753
0.344455
3755
0.344284
3520
0.344113
3395
0.343943
3247
0.343773
3010
0.343603
2851
0.343433
2771
0.343264
2613
0.343094
2566
0.342925
2374
0.342756
2338
0.342588
2259
0.342419
2295
0.342251
2245
0.342083
2268
0.341916
2340
0.341748
2390
0.341581
2554
0.341414
2665
0.341247
2855
0.34108
3069
0.340914
3777
0.340747
6112
0.340581
14740
0.340416
24295
0.34025
16159
0.340085
3032
0.33992
941
0.339755
637
0.33959
508
0.339425
464
0.339261
399
0.339097
377
0.338933
356
0.33877
385
0.338606
388
0.338443
374
0.33828
332
0.338117
363
0.337954
369
0.337792
334
0.33763
394
0.337468
376
0.337306
380
0.337144
336
0.336983
355
0.336822
295
0.336661
327
0.3365
303
0.33634
288
0.336179
285
0.336019
267
0.335859
266
0.3357
265
0.33554
278
0.335381
245
0.335222
273
0.335063
273
0.334904
253
0.334745
249
0.334587
234
0.334429
277
0.334271
279
0.334113
272
0.333956
305
0.333798
291
0.333641
583
0.333484
547
0.333328
789
0.333171
871
0.333015
273
0.332859
187
0.332703
205
0.332547
214
0.332391
231
0.332236
200
0.332081
230
0.331926
175
0.331771
212
0.331616
204
0.331462
165
0.331308
197
0.331154
221
0.331
198
0.330846
222
0.330693
223
0.33054
217
0.330386
194
0.330234
192
0.330081
205
0.329928
190
0.329776
224
0.329624
225
0.329472
204
0.32932
218
0.329169
208
0.329017
197
0.328866
212
0.328715
176
0.328564
213
0.328414
208
0.328263
205
0.328113
190
0.327963
198
0.327813
218
0.327663
202
0.327513
212
0.327364
189
0.327215
222
0.327066
207
0.326917
231
0.326768
209
0.32662
224
0.326472
235
0.326324
226
0.326176
224
0.326028
218
0.32588
248
0.325733
275
0.325586
240
0.325439
247
0.325292
217
0.325145
235
0.324999
216
0.324852
238
0.324706
235
0.32456
206
0.324414
219
0.324269
210
0.324123
221
0.323978
200
0.323833
220
0.323688
232
0.323543
234
0.323399
196
0.323254
209
0.32311
189
0.322966
245
0.322822
205
0.322678
191
0.322535
212
0.322391
186
0.322248
184
0.322105
211
0.321962
222
0.321819
205
0.321677
227
0.321534
231
0.321392
256
0.32125
210
0.321108
230
0.320967
217
0.320825
216
0.320684
210
0.320543
234
0.320401
239
0.320261
246
0.32012
241
0.319979
204
0.319839
244
0.319699
215
0.319559
237
0.319419
231
0.319279
230
0.31914
213
0.319
211
0.318861
236
0.318722
217
0.318583
237
0.318444
213
0.318306
205
0.318167
227
0.318029
216
0.317891
220
0.317753
209
0.317615
212
0.317477
218
0.31734
208
0.317203
219
0.317065
209
0.316928
226
0.316792
245
0.316655
246
0.316518
240
0.316382
209
0.316246
243
0.31611
223
0.315974
235
0.315838
234
0.315702
235
0.315567
266
0.315432
222
0.315297
217
0.315162
245
0.315027
231
0.314892
241
0.314758
247
0.314623
226
0.314489
242
0.314355
247
0.314221
231
0.314087
240
0.313954
240
0.31382
230
0.313687
226
0.313554
246
0.313421
215
0.313288
208
0.313155
210
0.313023
238
0.31289
238
0.312758
238
0.312626
278
0.312494
237
0.312362
246
0.312231
240
0.312099
250
0.311968
246
0.311837
266
0.311705
213
0.311575
262
0.311444
239
0.311313
239
0.311183
233
0.311052
227
0.310922
235
0.310792
239
0.310662
212
0.310533
219
0.310403
259
0.310273
253
0.310144
242
0.310015
240
0.309886
241
0.309757
252
0.309628
257
0.3095
241
0.309371
264
0.309243
244
0.309115
250
0.308987
218
0.308859
246
0.308731
263
0.308603
212
0.308476
234
0.308349
232
0.308221
244
0.308094
233
0.307967
247
0.307841
242
0.307714
235
0.307588
245
0.307461
243
0.307335
228
0.307209
245
0.307083
261
0.306957
267
0.306832
249
0.306706
257
0.306581
209
0.306455
243
0.30633
222
0.306205
245
0.30608
260
0.305956
214
0.305831
266
0.305707
251
0.305582
263
0.305458
283
0.305334
276
0.30521
238
0.305087
249
0.304963
234
0.304839
234
0.304716
221
0.304593
219
0.30447
244
0.304347
217
0.304224
226
0.304101
226
0.303979
238
0.303856
232
0.303734
220
0.303612
242
0.30349
203
0.303368
199
0.303246
205
0.303124
185
0.303003
232
0.302881
227
0.30276
246
0.302639
233
0.302518
286
0.302397
343
0.302276
361
0.302156
374
0.302035
358
0.301915
367
0.301795
355
0.301674
333
0.301554
312
0.301435
276
0.301315
303
0.301195
271
0.301076
238
0.300956
217
0.300837
273
0.300718
227
0.300599
195
0.30048
151
0.300362
142
0.300243
117
0.300125

INDUSTRIAL DIAMOND 45 DEG TOA, SCREEN, ION ETCH 20s 3 KeV
2003
5
7
23
9
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
2
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
1400
-1.04439
2
counts
d
Transmission
d
pulse counting
0.2
20
4.00E-06
0
0
0
0
768
0
0
0.586563
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
1
0
0.998688
0
0.995579
0
0.992495
0
0.989437
0
0.986404
0
0.983395
0
0.980411
0
0.977451
0
0.974514
0
0.971601
0
0.968711
0
0.965844
0
0.962999
0
0.960177
0
0.957377
0
0.954598
0
0.95184
0
0.949104
0
0.946389
0
0.943694
0
0.94102
0
0.938365
0
0.935731
0
0.933116
0
0.930521
0
0.927945
0
0.925387
0
0.922849
0
0.920329
0
0.917827
0
0.915343
0
0.912877
0
0.910429
0
0.907998
0
0.905585
0
0.903188
0
0.900808
0
0.898445
0
0.896099
0
0.893768
0
0.891454
0
0.889156
0
0.886873
0
0.884606
0
0.882354
0
0.880118
0
0.877896
0
0.87569
0
0.873498
0
0.871321
0
0.869158
0
0.867009
0
0.864875
0
0.862755
0
0.860648
0
0.858555
0
0.856475
0
0.854409
0
0.852356
0
0.850317
0
0.84829
0
0.846276
0
0.844274
0
0.842286
0
0.840309
0
0.838345
0
0.836394
0
0.834454
0
0.832526
0
0.83061
0
0.828706
0
0.826814
0
0.824932
0
0.823063
0
0.821204
0
0.819357
0
0.817521
0
0.815695
0
0.813881
0
0.812077
0
0.810284
0
0.808501
0
0.806729
0
0.804967
0
0.803215
0
0.801473
0
0.799742
0
0.79802
0
0.796309
0
0.794607
0
0.792914
0
0.791231
0
0.789558
0
0.787894
0
0.78624
0
0.784594
0
0.782958
0
0.781331
0
0.779713
0
0.778104
0
0.776503
0
0.774912
0
0.773329
0
0.771755
0
0.770189
0
0.768631
0
0.767082
0
0.765541
0
0.764009
0
0.762485
0
0.760968
0
0.75946
0
0.75796
0
0.756467
0
0.754983
0
0.753506
0
0.752037
0
0.750575
0
0.749121
0
0.747674
0
0.746235
0
0.744803
0
0.743379
0
0.741962
0
0.740552
0
0.739149
0
0.737753
0
0.736364
0
0.734982
0
0.733607
0
0.732239
0
0.730878
0
0.729523
0
0.728175
0
0.726834
0
0.725499
0
0.724171
0
0.722849
0
0.721533
0
0.720224
0
0.718922
0
0.717625
0
0.716335
0
0.715051
0
0.713773
0
0.712501
0
0.711235
0
0.709975
0
0.708722
0
0.707473
0
0.706231
0
0.704995
0
0.703764
0
0.702539
0
0.70132
0
0.700106
0
0.698898
0
0.697696
0
0.696499
0
0.695307
0
0.694121
0
0.69294
0
0.691765
0
0.690595
0
0.68943
0
0.68827
0
0.687116
0
0.685967
0
0.684823
0
0.683683
0
0.682549
0
0.68142
0
0.680296
0
0.679177
0
0.678063
0
0.676953
0
0.675849
0
0.674749
0
0.673654
0
0.672564
0
0.671478
0
0.670397
0
0.669321
0
0.668249
0
0.667182
0
0.666119
0
0.665061
0
0.664008
0
0.662958
0
0.661914
0
0.660873
0
0.659837
0
0.658805
0
0.657778
0
0.656755
0
0.655736
0
0.654721
0
0.65371
0
0.652704
0
0.651702
0
0.650704
0
0.649709
0
0.648719
0
0.647733
0
0.646751
0
0.645773
0
0.644799
0
0.643828
0
0.642862
0
0.641899
0
0.640941
0
0.639986
0
0.639035
0
0.638087
0
0.637144
0
0.636204
0
0.635267
0
0.634335
0
0.633406
0
0.632481
0
0.631559
0
0.630641
0
0.629726
0
0.628815
0
0.627908
0
0.627003
0
0.626103
0
0.625206
0
0.624312
0
0.623422
0
0.622535
0
0.621651
0
0.620771
0
0.619894
0
0.61902
0
0.61815
0
0.617283
0
0.616419
0
0.615558
0
0.614701
0
0.613846
0
0.612995
0
0.612147
0
0.611302
0
0.61046
0
0.609622
0
0.608786
0
0.607953
0
0.607124
0
0.606297
0
0.605474
0
0.604653
0
0.603836
0
0.603021
0
0.602209
0
0.6014
0
0.600594
0
0.599791
0
0.598991
0
0.598194
0
0.597399
0
0.596607
0
0.595818
0
0.595032
0
0.594249
0
0.593468
0
0.59269
0
0.591915
0
0.591142
0
0.590373
0
0.589605
0
0.588841
0
0.588079
0
0.58732
0
0.586563
end of experiment
